Piezo nano-positioning systems specialist PI (Physik Instrumente)
provides a 3-axis nano-positioning stage that is employed in a novel
laser lithography system by Nanoscribe GmbH. The lithography system can
produce complex 3-dimensional structures, fully automatic and
repeatable with a precision and flexibility previously unavailable.
Sub-micron structures with sizes of up to 1 mm und widths to 150 nm are
feasible.Piezo: The driving Force
The driving force of Nanoscribe’s laser lithography system is a
PImars P-563 flexure-guided, piezo-driven nanopositioning XYZ stage
from PI. It provides positioning ranges to 300x300x300 microns and
nanometer range repeatability. A parallel-metrology position feedback
system based on highly linear capacitive sensors is integrated and
allows the sample to be moved precisely and repeatedly in relation to
the laser focus. A digital piezo motion controller provides the
necessary path control on a nanometric scale.
The high accuracy and fast response of the piezoelectric nano
positioning stage makes it possible to equip surfaces with particular
biometric characteristics or to create microstructures for small pumps
and needles.. Typical applications for 3D laser lithography are the
creation of three-dimensional structures for cell biology.
More information at www.pi-usa.us/